000 00760cam a2200277ua 4500
001 34096
005 20171214164924.0
007 ta
008 100312s2007 Ne a g b000 u eng u
020 _a9780470016992
_cUSD130.00
040 _aMAIN
041 1 _aeng
_hNULL
044 _aNe
082 1 4 _a620.5
_bBAG/S
100 1 _aBaglio, Salvatore.
245 1 0 _aScaling issues and design of MEMS /
_cby Salvatore Baglio, Salvatore Castorina and Nicolo Savalli.
250 _a /
_b.
260 _aNewYork :
_bJohn Wiley ,
_c2007.
300 _a227p. :
_bfigures ;
_c22cm .
365 _aUSD130.00
504 _aIncludes index
653 0 _aAPPLIED MACHANIES
700 1 _aCastorina, Salvatore .
700 1 _aSavalli, Nicolo .
942 _cBK
999 _c33774
_d33774