TY  - BOOK
AU  - May,Gary S..
AU  - Sze,Simon M..
TI  - Fundamentals of semiconductor fabrication / 
SN  - 9788126532605
U1  - 621.38152 
PY  - 2004/// rep. 2012
CY  - New Delhi : 
PB  - Wiley India , 
KW  - SEMICONDUCTOR FABRICATION
KW  - ETCHING
KW  - DIFFUSION
N1  - includes appendix and index
ER  -