TY  - BOOK
AU  - Sze,S M.
TI  - VLSI technology / 
T2  - McGraw Hill series in electrical engineering, 
SN  - 9780070582910
U1  - 621.395 
PY  - 2003///
CY  - New Delhi : 
PB  - Tata McGraw Hill Education , 
KW  - INTEGRATED CIRCUITS-VERY LARGE SCALE INTEGRATION
N1  - Includes index
ER  -