TY - BOOK AU - Kumar,Phani TI - Principles of naotechnology: materials, tools and process at nanoscale SN - 9788183713337 U1 - 620.5 KUM/P 21 PY - 2013/// CY - Chennai PB - Scitech Publishers KW - NANOTECHNOLOGY N1 - State Grant 2016-2017; Includes bibliographic references and index ER -