TY  - BOOK
AU  - Kaul,Anupama B..
TI  - Microelectronics to nanoelectronics : materials, devices and manufacturability / 
SN  - 9781466509542
U1  - 621.3815 
PY  - 2012///
CY  - New York : 
PB  - CRC Press , 
KW  - NANOTECHNOLOGY
KW  - MICROELECTRONICS
KW  - NANOELECTRONICS
N1  - includes bibliographical references and index
ER  -