Ibbs, K.G.. <br/><br/>
Laser chemical processing for microelectronics /  
edited by K. G. Ibbs, Richard Magee. 
 - Cambridge :   Cambridge University Press ,   1989. 
 - ix,172p. :   Ills. ;   25cm. .  
 - Cambridge studies in modern optics no;7,       ; .
 - Cambridge studies in modern optics no;7,       ; .
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<br/><br/><label>ISBN: </label>0521322545  UKP 50.00 
<br/><br/><label>Subjects--Index Terms: </label>LASER-INDUSTRIAL APPLICATIONS 
<br/><br/><label>Dewey Class. No.: </label>621.381  / IBB/L