TY  - BOOK
AU  - Baglio,Salvatore
AU  - Castorina,Salvatore  .
AU  - Savalli,Nicolo  .
TI  - Scaling issues and design of MEMS / 
SN  - 9780470016992
U1  - 620.5 
PY  - 2007///
CY  - NewYork : 
PB  - John Wiley , 
KW  - APPLIED MACHANIES
N1  - Includes index
ER  -