Baglio, Salvatore. <br/><br/>
Scaling issues and design of MEMS /  
by Salvatore Baglio, Salvatore Castorina and Nicolo Savalli. 
 - /   . 
 - NewYork :   John Wiley ,   2007. 
 - 227p. :   figures ;   22cm .  
<br/><br/>Includes index 
<br/><br/><label>ISBN: </label>9780470016992  USD130.00 
<br/><br/><label>Subjects--Index Terms: </label>APPLIED MACHANIES 
<br/><br/><label>Dewey Class. No.: </label>620.5  / BAG/S