TY  - BOOK
AU  - Ghandhi,Sorab K.
TI  - VLSI fabrication principles : silicon and gallium arsenide / 
SN  - 9814126942
U1  - 621.38152 
PY  - 2005///
CY  - NewYork : 
PB  - John Wiley , 
KW  - SILICON
N1  - Includes index
ER  -