Ghandhi, Sorab K. <br/><br/>
VLSI fabrication principles : silicon and gallium arsenide /  
Sorab K Ghandhi. 
 - 2nd ed /   . 
 - NewYork :   John Wiley ,   2005. 
 - xxiv,834p. :   figs.,charts,tables ;   24cm  CD .  
<br/><br/>Includes index 
<br/><br/><label>ISBN: </label>9814126942  USD7.50 
<br/><br/><label>Subjects--Index Terms: </label>SILICON 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / GHA/V