Rossnagel, Stephen M. <br/><br/>
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /  
edited by S M Rossnagel, Jerome J Cuomo and William D Westwood. 
 - New Jersey :   Noyes Publications ,   1989. 
 - xxiii,523p. :   ills.,figs. ;   25cm  ` .  
 - Materials science and process technology,   NULL  NULL; .
 - Materials science and process technology,   NULL  NULL; .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0815512201  USD 86.00 
<br/><br/><label>Subjects--Index Terms: </label>PLASMA ENGINEERING SEMICONDUCTORS-ETCHING PLASMA ETCHING 
<br/><br/><label>Dewey Class. No.: </label>621.044  / ROS/H