Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
edited by S M Rossnagel, Jerome J Cuomo and William D Westwood.
- New Jersey : Noyes Publications , 1989.
- xxiii,523p. : ills.,figs. ; 25cm ` .
- Materials science and process technology, NULL NULL; .
- Materials science and process technology, NULL NULL; .