Baglio, Salvatore.
Scaling issues and design of MEMS / by Salvatore Baglio, Salvatore Castorina and Nicolo Savalli. - / . - NewYork : John Wiley , 2007. - 227p. : figures ; 22cm .
Includes index
9780470016992 USD130.00
APPLIED MACHANIES
620.5 / BAG/S
Scaling issues and design of MEMS / by Salvatore Baglio, Salvatore Castorina and Nicolo Savalli. - / . - NewYork : John Wiley , 2007. - 227p. : figures ; 22cm .
Includes index
9780470016992 USD130.00
APPLIED MACHANIES
620.5 / BAG/S