Rossnagel, Stephen M.
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / edited by S M Rossnagel, Jerome J Cuomo and William D Westwood. - New Jersey : Noyes Publications , 1989. - xxiii,523p. : ills.,figs. ; 25cm ` . - Materials science and process technology, NULL NULL; . - Materials science and process technology, NULL NULL; .
Includes bibliographical references and index
0815512201 USD 86.00
PLASMA ENGINEERING SEMICONDUCTORS-ETCHING PLASMA ETCHING
621.044 / ROS/H
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / edited by S M Rossnagel, Jerome J Cuomo and William D Westwood. - New Jersey : Noyes Publications , 1989. - xxiii,523p. : ills.,figs. ; 25cm ` . - Materials science and process technology, NULL NULL; . - Materials science and process technology, NULL NULL; .
Includes bibliographical references and index
0815512201 USD 86.00
PLASMA ENGINEERING SEMICONDUCTORS-ETCHING PLASMA ETCHING
621.044 / ROS/H
